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ELECĀ 5707 [0.5 credit] (ELG 6377) Microsensors and MEMS

Physical design of microelectromechanical systems (MEMS) and microfabricated sensors and actuators. An overview of thin and thick film processes and micromachining techniques will provide fabrication background. Device design including piezoresistive, piezoelectric, electromagnetic, thermal, optical, and chemical sensors and actuators.